• Optical Inspection System:
During the wafer handling, the system is using the robotic arm to transfer the wafer to/from
pre-aligner or inspection chuck. Besides, WIS8000 comes with wafer
gripper with the tilting capability for front and back wafer inspection
(macro inspection) and high-power microscope with 5 objectives for the
micro inspection.
• Post Wire Bond Inspection System:
High resolution and speed of vision inspection system, PWB2000 is
automated, reliable and effective solution for post die attach and post wire
bond inspection. The system comes with the area scanning camera that
capable to capture defects by using the 2D vision system. Integrated with
programmable dual XY stage and on-the-fly scanning method, the system
can accommodate multiple magazines at one time operation and eliminate
the waiting time.
• Automated Post Mold Inspection System:
PMI3000 is an automated 2D vision inspection system for molded device.
It’s come with top and bottom vision inspection capability, by using high
resolution camera up to 20MP, lens with 0.5x to 1.3x magnification and
illumination. System capable to capture small defect size up to 10x10
micron under 1.3x lens magnification.
• Wafer Thickness & Roughness Measurement System: Laser based Wafer Thickness and Roughness Measurement System designed by Chapman Instrument Inc., USA and OEM by QES Mechatronic Sdn Bhd. A non-contact measurement system measures several parameters in a single system. (wafer & tape thickness, roughness, TTV, bump height,bow and warp measurements).
• Post Probing Inspection System: The PPI3300 is an ideal solution for detecting defects on 8-inch and 12-inch
patterned wafer surfaces such as scratches, ink dot smear, probe marks, water marks, and die edge cracks. High Speed CMOS camera with
resolution of 26.1MP & CoaXPress interface is used in the system. The combination of 5120 x 5120 high resolution, high speed at 90 FPS and
global shutter create a new standard for the inspection application.
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